The MERLIN FE-SEM overcomes the conflict between image resolution and analytical capability. The core of MERLIN is the enhanced GEMINI II column which, with its double condenser system, achieves an image resolution of 0.8 nanometers. A sample current of up to 100 nanoamperes is available for analytical purposes such as energy dispersive X-ray spectroscopy (EDS) and diffraction analysis of backscattered electrons (EBSD) .
Resolution: 0.8nm at 15kV
1.4nm at 1kV
Probe current: 4pA - 100nA
Acceleration voltage: 0.2 - 30 kV
Backscattered in-lens EsB
Detector EDS Oxford LINCA X-Max
EBSD analisys Oxford Nordlys II
The system supports the user with a wide range of detailed solutions for tasks that could not be adequately performed in the past. This consists of the in-lens SE detector for surface imaging, the in-lens EsB detector for material contrast and the AsB detector for widely dispersed backscattered electrons. The latter contain specific information on the crystal orientation of the sample.
The unique charge compensation system of MERLIN also allows the high-resolution imaging of non-conductive samples. Electrons which accumulate on the surface of the sample are swept away by a fine jet of nitrogen. In doing so, the complete detection system of MERLIN can be used.
Imatges alta resolució
This equipment has been financed by 50% by the Regional Development Fund ERDF into the operational framework of Catalonia 2007-2013.